Sensor configuration
| Optics-transmitted light | |
| Transmitted light camera HR70, BF approx. 4.0 x 3.6 mm2 | basic |
| Transmitted light camera 5 Mpx, BF approx. 4.4 x 4.0 mm2 | optional |
| Transmitted light camera WF, BF approx. 15.5 x 14.1 mm2 | optional |
| Optics incident light | |
| incident light camera HR50 Standard, BF approx. 1.1 x 1.0 mm2 | base |
| Incident light camera HR50 Micro, BF approx. 0.4 x 0.4 mm2 | optional |
| Tactile | |
| Scanning probe | optional |
Measuring machine configuration
| Spindle | |
| High-precision spindle »ace | base« |
| High-precision spindle SK 50 | optional |
| ROD | base |
| Hollow encoder | optional |
| Linear drive | |
| Tilting axis incident light | base |
| Swivel axis incident light & transmitted light | base |
| Optics drive | |
| Pivot axis incident light | base |
| Tilt axis incident light & transmitted light | optional |
| Vibration damping | |
| Leveling element on machine feet | base |
| Active vibration decoupling | optional |
| Material | |
| Light metal alloy | base |
