Sensor configuration
| Optics-transmitted light | |
| Transmitted light camera HR70, BF approx. 4.0 x 3.6 mm2 | basic |
| Transmitted light camera 5 Mpx, BF approx. 5.5 x 5.0 mm2 | optional |
| Transmitted light camera WF, BF approx. 15.5 x 14.1 mm2 | optional |
| Optics incident light | |
| Reflected light camera HR70 Standard, BF approx. 1.1 x 1.0 mm2 | Basic |
| Incident light camera HR70 Micro, BF approx. 0.4 x 0.4 mm2 | optional |
| »zep sensor«(cutting edge preparation) | optional |
| »zep-R sensor«(cutting edge preparation/roughness) | optional |
| »Z3dCam sensor«(digitization) | optional |
| Tactile | |
| Scanning probe | optional |
Measuring machine configuration
| Spindle | |
| High-precision spindle »tcs | basic« |
| High-precision spindle »ahd | optional« |
| Hollow encoder | base |
| Linear drive | |
| Positive locking ball screw | base |
| X-, Y-axis in cross table design | base |
| Optics drive | |
| Swivel axis incident light | base |
| Swivel axis incident light & transmitted light | optional |
| Vibration damping | |
| Integrated, active with level control | base |
| Leveling element on machine feet | base |
| Material | |
| Hard stone | base |